Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon films
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 166-170
- https://doi.org/10.1016/0924-4247(94)00883-j
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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