Self-compensating piezoresistive pressure sensor
- 15 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 368-374
- https://doi.org/10.1016/0924-4247(94)80014-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Temperature compensation of piezoresistive pressure sensorsSensors and Actuators A: Physical, 1992
- Nonlinear analysis of a CMOS integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1987