Temperature compensation of piezoresistive pressure sensors
- 1 June 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (3) , 155-162
- https://doi.org/10.1016/0924-4247(92)80161-u
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Nonlinear analysis of a CMOS integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1987
- Miniature pressure sensors and their temperature compensationSensors and Actuators, 1987
- MOS Integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1985
- Piezoresistive Properties of Silicon Diffused LayersJournal of Applied Physics, 1963