Microstructure of epitaxial layers deposited on silicon by ion assisted deposition
- 31 January 2001
- journal article
- Published by Elsevier in Solar Energy Materials and Solar Cells
- Vol. 65 (1) , 503-508
- https://doi.org/10.1016/s0927-0248(00)00133-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Epitaxial Growth on Porous Si for a New Bond and Etchback Silicon‐on‐InsulatorJournal of the Electrochemical Society, 1995
- HREM Investigations of the Agglomeration of Self-Interstitials in SiliconPhysica Status Solidi (a), 1993
- Atomic modelling of homogeneous nucleation of dislocations from condensation of point defects in siliconPhilosophical Magazine A, 1981