Micromachining of an air-bridge structure using thin-films on glass substrates
- 1 April 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 74 (1-3) , 5-8
- https://doi.org/10.1016/s0924-4247(98)00322-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Application of Thin-Film Micromachining on GlassMRS Proceedings, 1998
- Silicon microstructuring technologyMaterials Science and Engineering: R: Reports, 1996
- Hydrogenated Amorphous SiliconPublished by Cambridge University Press (CUP) ,1991
- Silicon micromechanics: sensors and actuators on a chipIEEE Spectrum, 1990
- Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 1988