Investigation of thin-film transistors using a combination of focused ion beam etching and cross-sectional transmission electron microscopy observation
- 1 August 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 281-282, 562-567
- https://doi.org/10.1016/0040-6090(96)08718-4
Abstract
No abstract availableKeywords
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