Annular dark field electron microscope images with better than 2 Å resolution at 100 kV
- 4 December 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (23) , 2456-2458
- https://doi.org/10.1063/1.102297
Abstract
High-resolution scanning transmission electron microscope (STEM) images in the annular dark field (ADF) imaging mode approaching the theoretical point-to-point resolution limit are presented. The ADF images were obtained from a high Tc superconducting YBa2Cu3O7−x thin-film specimen at 100 kV. The 1.9 Å resolution lattice image, which is the smallest lattice spacing in the specimen, corresponds to the minimum resolvable spatial frequency with 5% contrast in the contrast transfer function for annular dark field, and is smaller than the resolution limit given by the Rayleigh criterion. This demonstrates that STEM ADF imaging can have a resolution approximately 40% better than that of the bright field conventional transmission electron microscope (CTEM) imaging at Scherzer condition.Keywords
This publication has 11 references indexed in Scilit:
- Detection of small displacement of atoms in crystals by atom resolution electron microscopyJournal of Electron Microscopy Technique, 1989
- Chemically sensitive structure-imaging with a scanning transmission electron microscopeNature, 1988
- Visibility of single heavy atoms on thin crystalline silicon in simulated annular dark-field STEM imagesActa Crystallographica Section A Foundations of Crystallography, 1988
- Surface decomposition of superconducting YBa2Cu3O7Physica Status Solidi (a), 1988
- Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealingApplied Physics Letters, 1987
- Simulation of annular dark field stem images using a modified multislice methodUltramicroscopy, 1987
- Test specimens for a dark field stem imaging: Measuring lattice spacing and electron probe size of a STEM and testing visibility of atoms of various atomic numbersUltramicroscopy, 1980
- Scanning Transmission Electron Microscopy at High ResolutionProceedings of the National Academy of Sciences, 1974
- A test object and criteria for high resolution electron microscopyJournal of Applied Crystallography, 1968
- The Theoretical Resolution Limit of the Electron MicroscopeJournal of Applied Physics, 1949