Optical precision profilometer using the differential method
- 1 October 1987
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 12 (10) , 792-794
- https://doi.org/10.1364/ol.12.000792
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 5 references indexed in Scilit:
- Roughness measurement using a shearing interference microscopeApplied Optics, 1986
- Surface-roughness measurement by digital processing of Nomarski phase-contrast imagesOptics Letters, 1985
- Surface roughness measurements of low-scatter mirrors and roughness standardsApplied Optics, 1984
- Stylus profiling instrument for measuring statistical properties of smooth optical surfacesApplied Optics, 1981
- Optical heterodyne profilometryApplied Optics, 1981