New MOS-Type Glucose Sensor Using Sputtered LaF3 Film

Abstract
A MOS-type micro glucose sensor using a sputtered LaF3 (solid electrolyte) film was newly developed. The sensor, having a structure of GOD (glucose oxidase) immobilized film/Pt/LaF3/SiO2/Si/Al multiple layers, needs no external reference electrode. A stable response was obtained in the glucose concentration range from 2×10-4 to 2×10-2 M in a phosphate buffer solution of (pH 6.9), with a 90% response time of ca. 1 min. This MOS-type sensor was found to also respond to H2O2 in the buffer.