Magnetron sputter deposition and characterisation of Ti/TiN, Au/TiN and MoSX/Pb multilayers
- 1 October 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 94-95, 490-494
- https://doi.org/10.1016/s0257-8972(97)00431-3
Abstract
No abstract availableKeywords
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