Effects of substrate temperature and substrate material on the structure of reactively sputtered TiN films
- 1 December 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 122 (2) , 115-129
- https://doi.org/10.1016/0040-6090(84)90003-8
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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