AFM and light scattering measurements of optical thin films for applications in the UV spectral region
- 1 May 1998
- journal article
- Published by Elsevier in International Journal of Machine Tools and Manufacture
- Vol. 38 (5-6) , 733-739
- https://doi.org/10.1016/s0890-6955(97)00125-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Roughness analysis of optical films and substrates by atomic force microscopyThin Solid Films, 1996
- Multiscale roughness in optical multilayers: atomic force microscopy and light scatteringApplied Optics, 1996
- Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengthsPublished by SPIE-Intl Soc Optical Eng ,1996
- Optical coatings for UV photolithography systemsPublished by SPIE-Intl Soc Optical Eng ,1996
- Scanning force microscope as a tool for studying optical surfacesApplied Optics, 1995
- Microstructure of vapor-deposited optical coatingsApplied Optics, 1984