Integrated thin film PZT pyroelectric detector arrays
- 1 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 59-66
- https://doi.org/10.1016/0167-9317(95)00115-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Ion beam milling of pyroelectric ceramics for advanced thermal detector arraysJournal of Vacuum Science & Technology A, 1989
- Pyroelectric devices and materialsReports on Progress in Physics, 1986