Tip-induced local anodic oxidation on the nativelayer of Si(111) using an atomic force microscope
- 26 October 2001
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 64 (19) , 195324
- https://doi.org/10.1103/physrevb.64.195324
Abstract
Atomic force mocroscope (AFM) tip-induced local anodic oxidation on a native layer of Si(111) which is in contact mode is presented in an ambient way. This local anodic oxidation was subjected to varying sample voltages. When an AFM tip was positioned on a surface point with various voltage pulses of 10 V point oxide protrusions were tip induced. The protruded height grew exponentially due to the duration. Large-area oxide bumps also become tip induced when an AFM tip was swept across large surface areas. The bump height increased and was linearly dependent on the sample voltage. Two possible approaches to local anodic oxidation on the native layer are discussed.
Keywords
This publication has 29 references indexed in Scilit:
- Proximal probe-based fabrication of nanometer-scale devicesMaterials Science and Engineering: B, 1998
- Proximal probe-based fabrication of nanostructuresSemiconductor Science and Technology, 1996
- Silicon metal-oxide-semiconductor field-effect transistor with gate structures defined by scanned probe lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- AFM-based fabrication of Si nanostructuresPhysica B: Condensed Matter, 1996
- Nanofabrication with proximal probesSurface Science, 1996
- Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti systemApplied Physics Letters, 1996
- Fabrication of nanometer-scale side-gated silicon field effect transistors with an atomic force microscopeApplied Physics Letters, 1995
- Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscopeApplied Physics Letters, 1995
- Machining Oxide Thin Films with an Atomic Force Microscope: Pattern and Object Formation on the Nanometer ScaleScience, 1992
- Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in airApplied Physics Letters, 1990