The influence of channelling on the sputtering yield of polycrystalline copper
- 1 January 1981
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 58 (5) , 139-144
- https://doi.org/10.1080/01422448108229077
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The Z1dependence of heavy-ion sputtering yield in copperRadiation Effects, 1972
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Single-crystal sputtering including the channeling phenomenonCanadian Journal of Physics, 1968
- THE INFLUENCE OF CHANNELING ON Cu SINGLE-CRYSTAL SPUTTERINGApplied Physics Letters, 1966