Construction of an inexpensive dc plasma jet for diamond deposition using commercially available components
- 1 March 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (3) , 2065-2068
- https://doi.org/10.1063/1.1143167
Abstract
A dc plasma jet reactor system, constructed from commercially available components, is described. Parameters for the chemical vapor deposition of high quality diamond are given. Diamond films were synthesized on Mo, Si, Cu, and stainless‐steel substrates and characterized by optical microscopy and Raman spectroscopy.Keywords
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