Electron kinetics of silane discharges
- 1 December 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 43 (11) , 1012-1014
- https://doi.org/10.1063/1.94226
Abstract
A numerical solution of the Boltzmann transport equation for electrons has been used to calculate the electron energy distribution function in silane for a range of applied steady-state fields. This enables the evaluation of the fractional energy transfer for vibrational excitation and dissociation, the rate coefficients for the different processes and the electron transport properties.Keywords
This publication has 9 references indexed in Scilit:
- Dissociation cross sections of silane and disilane by electron impactChemical Physics, 1982
- Emission cross sections from fragments produced by electron impact on silaneChemical Physics, 1982
- Ion and radical reactions in the silane glow discharge deposition of a-Si:H filmsPlasma Chemistry and Plasma Processing, 1982
- Effects of rf power and reactant gas pressure on plasma deposited amorphous hydrogenated siliconJournal of Applied Physics, 1981
- Effects of inert gas dilution of silane on plasma-deposited a-Si:H filmsApplied Physics Letters, 1981
- andProduction in PlasmasPhysical Review Letters, 1979
- Effect of Vibrational and Rotational Exictation on Dissociative Attachment in HydrogenPhysical Review Letters, 1978
- Electron drift velocities in molecular-gas-rare-gas mixturesPhysical Review A, 1976
- Kinetics of Decomposition of Silane (Diluted in Argon) in a Low Pressure Glow DischargeJournal of the Electrochemical Society, 1975