Experimental Observations of Substrate Fracture Caused by Residually Stressed Films
- 8 March 1990
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 73 (3) , 634-638
- https://doi.org/10.1111/j.1151-2916.1990.tb06564.x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Decohesion of Thin Films From Ceramic SubstratesMRS Proceedings, 1985
- Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substratesJournal of Applied Physics, 1978
- Theory of Elasticity (3rd ed.)Journal of Applied Mechanics, 1970