Electrical properties of thin high- dielectric Ta2O5 films
- 1 October 1994
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 25 (7) , 533-537
- https://doi.org/10.1016/0026-2692(94)90038-8
Abstract
No abstract availableKeywords
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- On Pre-Breakdown Phenomena in Insulators and Electronic Semi-ConductorsPhysical Review B, 1938