Physical properties of amorphous silicon, prepared by HF silane decomposition at high substrate temperature
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 1391-1394
- https://doi.org/10.1016/0022-3093(87)90333-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Vibrational spectroscopy of hydrogenated evaporated amorphous silicon filmsJournal of Non-Crystalline Solids, 1983
- ESR in Hydrogenated Amorphous SiliconJapanese Journal of Applied Physics, 1980
- Hydrogen evolution and defect creation in amorphous Si: H alloysPhysical Review B, 1979