Laser Processing, Characterization, and Modeling of Epitaxial Si/TiN/Si (100) Heterostructures
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Temperature and energy dependence of ion-beam synthesis of epitaxial Si/CoSi2/Si heterostructuresJournal of Applied Physics, 1990
- Dislocations and interfaces in semiconductor heterostructuresJOM, 1989
- Si / CoSi2 / Si Structures: Pseudomorphism, Interface Structures, Epitaxial Orientations, and the Control of PinholesJournal of the Electrochemical Society, 1989
- Buried Layer Tungsten Deposits In Porous Silicon: Metal Penetration Depth and Film Purity DeterminantsMRS Proceedings, 1987