Optical and Compositional Properties of Amorphous SixCyFz Films Prepared by Reactive Sputtering
- 16 January 1982
- journal article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 69 (1) , 133-138
- https://doi.org/10.1002/pssa.2210690111
Abstract
No abstract availableKeywords
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