MOLECULAR DYNAMICS SIMULATION OF LOW ENERGY CLUSTER DEPOSITION DURING DIFFUSION-LIMITED THIN FILM GROWTH
- 1 May 1997
- journal article
- Published by Elsevier in Nanostructured Materials
- Vol. 8 (3) , 253-268
- https://doi.org/10.1016/s0965-9773(97)00166-9
Abstract
No abstract availableKeywords
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