The influence of chemical treatment upon the composition and nature of (100) surfaces of indium phosphide
- 14 April 1979
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 12 (4) , 651-656
- https://doi.org/10.1088/0022-3727/12/4/022
Abstract
Using the technique of selected area Auger sampling, an examination has been made of the composition and contaminant state of (100) surfaces of indium phosphide. The chemical state of surfaces stored under various conditions and following cleaning with organic solvents or etching with hydrofluoric acid has also been investigated.Keywords
This publication has 1 reference indexed in Scilit:
- The chemical polishing of semiconductorsJournal of Materials Science, 1975