Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition
- 1 August 1994
- journal article
- Published by IOP Publishing in Chinese Physics Letters
- Vol. 11 (8) , 518-521
- https://doi.org/10.1088/0256-307x/11/8/015
Abstract
Lead zirconate titanate thin films were prepared by pulsed excimer laser deposition on silicon substrates. Rapid thermal annealing was used to improve its properties. Structural and interfacial characteristics of the films before and after annealing were investigated by x-ray diffraction, Rutherford backscattering spectrometry and automatic spreading resistance.Keywords
This publication has 2 references indexed in Scilit:
- Pulsed excimer laser deposition and characterization of ferroelectric Pb(Zr0.52Ti0.48)O3 thin filmsJournal of Materials Research, 1992
- Influence of Laser Fluence on Structural and Ferroelectric Properties of Lead-Zirconate-Titanate Thin Films Prepared by Laser AblationJapanese Journal of Applied Physics, 1991