Nanoindentation experiments on some amorphous hydrogenated carbon (a-C:H) thin films on silicon
- 1 January 1992
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 27 (14) , 3939-3952
- https://doi.org/10.1007/bf00545479
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- The deformation behavior of ceramic crystals subjected to very low load (nano)indentationsJournal of Materials Research, 1992
- Modelling the contact response of coated systemsSurface and Coatings Technology, 1991
- Thermal effects on the microstructure and mechanical properties of ion implanted ceramicsJournal of Materials Science, 1991
- Surface Deformation Behaviour of Tic and Tin Coated Steels: 1 Indentation ResponseSurface Engineering, 1989
- Assessment of Coating HardnessSurface Engineering, 1987
- Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniquesJournal of Materials Research, 1986
- Characterization of Submicrometre Surface Layers by IndentationPublished by ASTM International ,1985
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- Hardness measurement at penetration depths as small as 20 nmPhilosophical Magazine A, 1983
- MICROHARDNESS TESTS WITH PENETRATION DEPTHS LESS THAN ION IMPLANTED LAYER THICKNESSPublished by Elsevier ,1982