The vacuum use of perfluoro polyether
- 1 January 1979
- Vol. 29 (11-12) , 433-437
- https://doi.org/10.1016/s0042-207x(79)80892-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Properties and use of perfluoro polyethers for vacuum applicationsJournal of Vacuum Science and Technology, 1978
- 1.17 Turbomolecular pumps with corrosion-resistant oil for the lubrication and cooling of the rotor bearingsVacuum, 1977
- The behaviour of perfluoropolyether and other vacuum fluids under ion and electron bombardmentNuclear Instruments and Methods, 1973
- The use of perfluoroalkyl polyether fluids in vacuum pumpsVacuum, 1971