Epitaxiale siliziumschichten auf spinell durch aufdampfen im ultra-hoch vakuum
- 30 September 1971
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 6 (9) , 817-822
- https://doi.org/10.1016/0025-5408(71)90118-8
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- A Comparison of the Hole Mobility and Early Growth of Epitaxial Silicon on Flame Fusion, Flux, and Czochralski SpinelJournal of the Electrochemical Society, 1971
- The chemical polishing of magnesium aluminate spinel in pyrophosphoric acidMaterials Research Bulletin, 1970
- Analysis of Carrier Transport in Vacuum-Evaporated Epitaxial Films of Silicon on SpinelJournal of Applied Physics, 1969
- Epitaxial Films of Silicon on Spinel by Vacuum EvaporationJournal of Applied Physics, 1969
- Mechanical and electrical properties of epitaxial silicon films on spinelSolid-State Electronics, 1968