Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
- 1 March 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (3A) , L434
- https://doi.org/10.1143/jjap.28.l434
Abstract
Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor c-axis crystal orientation.Keywords
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