High current pelletron for ion implantation
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 515-517
- https://doi.org/10.1016/0168-583x(89)91035-5
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Heavy ion Rutherford scattering for target profiling, and measurement of heavy element concentrations and isotopic ratiosNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Adhesion enhancement induced by MeV ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Detection of semiconductor dopants using accelerator mass spectrometryNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- MeV implantation for VLSINuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- PIXE analysis of thick targetsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Ion channeling study of radiation induced defects in a bent silicon crystalNuclear Instruments and Methods in Physics Research, 1983
- The French AEC nuclear microprobe: Description and first application examplesNuclear Instruments and Methods in Physics Research, 1983