Constant-psi constant-delta contour maps: applications to ellipsometry and to reflection-type optical devices
Open Access
- 15 February 1982
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 21 (4) , 739-743
- https://doi.org/10.1364/ao.21.000739
Abstract
Constant-psi constant-delta contour maps in the reduced angle-of-incidence–film-thickness plane that are useful in ellipsometry and in design of reflection-type optical devices are discussed. As a specific example, a contour map is given for the SiO2–Si film–substrate system at the 6328-Å He–Ne laser wavelength.Keywords
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