Sputtering studies with the Monte Carlo Program TRIM.SP
- 1 June 1984
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 34 (2) , 73-94
- https://doi.org/10.1007/bf00614759
Abstract
No abstract availableKeywords
This publication has 41 references indexed in Scilit:
- Sputtering models—A synoptic viewRadiation Effects, 1983
- Primary recoil contribution to low energy light ion sputteringNuclear Instruments and Methods in Physics Research, 1982
- The Stopping and Range of Ions in SolidsPublished by Springer Nature ,1982
- Some effects of ion mass on the energy spectrum of sputtered gold atomsPhilosophical Magazine A, 1981
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Experimental study of effective interatomic potentialsPhysical Review A, 1979
- Transmission sputtering by heavy ionsPhysical Review B, 1978
- Calculations of nuclear stopping, ranges, and straggling in the low-energy regionPhysical Review B, 1977
- Channeling, Blocking, and Range Measurements using Thermal Neutron Induced ReactionsPublished by Springer Nature ,1975
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969