Sputtering models—A synoptic view
- 1 January 1983
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 70 (1) , 1-64
- https://doi.org/10.1080/00337578308219205
Abstract
No abstract availableKeywords
This publication has 80 references indexed in Scilit:
- Sputtering by ion bombardment theoretical conceptsPublished by Springer Nature ,1981
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Single-crystal sputtering including the channeling phenomenonCanadian Journal of Physics, 1968
- THE INFLUENCE OF CHANNELING ON Cu SINGLE-CRYSTAL SPUTTERINGApplied Physics Letters, 1966
- THE CHANNELING OF ENERGETIC ATOMS IN CRYSTAL LATTICESApplied Physics Letters, 1963
- Extended Theory of SputteringThe Journal of Chemical Physics, 1960
- Theory of the Sputtering ProcessPhysical Review B, 1956
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955
- A Mechanism for Sputtering in the High Vacuum Based upon the Theory of Neutron CoolingPhysical Review B, 1952