Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering
- 1 June 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 229 (1) , 17-23
- https://doi.org/10.1016/0040-6090(93)90402-b
Abstract
No abstract availableKeywords
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