Indium tin oxide films from metallo-organic precursors
- 1 July 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 161, 273-280
- https://doi.org/10.1016/0040-6090(88)90259-3
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Preparation and characterization of indium tin oxide films produced by the d.c. sputtering techniqueThin Solid Films, 1985
- Properties of thin In2O3 and SnO2 films prepared by corona spray pyrolysis, and a discussion of the spray pyrolysis processThin Solid Films, 1984
- Magnetron dc reactive sputtering of titanium nitride and indium–tin oxideJournal of Vacuum Science and Technology, 1977