Direct observation of insulators with a scanning electron microscope
- 1 November 1976
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 9 (11) , 1017-1020
- https://doi.org/10.1088/0022-3735/9/11/036
Abstract
A low energy electron gun is used to discharge insulating specimens during observation with a scanning electron microscope. The apparatus includes essentially the gun, an optical microscope, a supplementary grid before the electron detector, and a video signal chopper. Either topographic, chemical, crystallographic or potential contrasts can be observed with a high energy (30 keV) electron probe; observation of insulators under deformation is possible.Keywords
This publication has 3 references indexed in Scilit:
- A new method for contrast correction with tilted samples in a scanning electron microscopeJournal of Physics E: Scientific Instruments, 1976
- Observation by scanning electron microscopy of radiation damage produced in LiF by ionic bombardmentsRadiation Effects, 1975
- Electron Channelling Patterns from Small (10 µm) Selected Areas in the Scanning Electron MicroscopeNature, 1970