Robust design of gas and liquid micropumps
- 1 June 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 68 (1-3) , 480-486
- https://doi.org/10.1016/s0924-4247(98)00053-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988