Observation of buried oxide layers in silicon by microprobe RBS
- 1 May 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 77 (1) , 369-372
- https://doi.org/10.1016/0168-583x(93)95568-p
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- High-speed data processing for three-dimensional analysis by micro-RBSNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Nuclear microscopy of GaAs/Si heterostructuresNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Evaluation of beam-induced ablation during microbeam irradiationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Focused MeV beam line for microanalysis at OsakaNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Multidimensional ion microbeam analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986