Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering (for magnetic discs)
- 1 November 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 27 (6) , 5160-5162
- https://doi.org/10.1109/20.278773
Abstract
No abstract availableKeywords
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