Abstract
Thermal expansion of the hexagonal (4H) polytype of SiC was measured from 20 to 1000 °C by the x‐ray diffraction technique. The principal axial coefficients of thermal expansion are expressed by the second‐order polynomials: α11=3.21×106+3.56×109T−1.62×1012T2, and α33=3.09×106+2.63×109T−1.08×1012T2 (°C1). The α11 is larger than the α33 over the entire temperature range, yielding a thermal expansion anisotropy ‘‘A’’ of 0.04 at room temperature which increases to 0.11 at 1000 °C. The thermal expansion of the (4H) structure is compared with previously published results for the cubic (3C) and the hexagonal (6H) SiC polytypes.

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