Chemical Status and Surface Topography of Si(111) After HF/NH4F/H2O Wet Chemical Treat-Ments: Investigations With STM, AES, and TDS
- 24 October 1993
- journal article
- Published by Springer Nature in MRS Proceedings
- Vol. 315 (1) , 497-504
- https://doi.org/10.1557/proc-315-497
Abstract
No abstract availableKeywords
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