Crack progression and interface debonding in brittle/ductile nanoscale multilayers
- 1 August 1995
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 10 (8) , 1958-1968
- https://doi.org/10.1557/jmr.1995.1958
Abstract
Crack initiation and progression have been studied in nanoscale brittle/ductile multilayers of Cu and Si. Variations in the interface debond energy on the cracking behavior have been examined by using thin interlayers comprising either Cr (strong interface) or Au (weak interface). For strongly bonded Cr interfaces, it has been found that cracks forming in the Si invariably extend through the Cu layers, despite the ductile rupture characteristics of the Cu. This behavior occurs even when the Cu layers comprise more than 70% of the multilayer volume. It also contrasts with the crack arrest capabilities exhibited by relatively thick ductile layers (∼10-100 μm). The disparity in behavior is attributed to the relatively large cracking strain required for the thin brittle layers. Weak Au interfaces result in debonding which, in turn, can suppress the propagation of cracks into adjacent layers. However, when the interface includes strongly bonded sections, the debond arrests, and often kinks into the attached Si. In this case, cracking still progresses sequentially through the Si layers. Careful control of the interface debond energy is needed to fully suppress crack progression in nanoscale multilayers.Keywords
This publication has 25 references indexed in Scilit:
- Strain gradient plasticity: Theory and experimentPublished by Elsevier ,2003
- The cracking resistance of nanoscale layers and filmsJournal of Materials Research, 1995
- A new procedure for measuring the decohesion energy for thin ductile films on substratesJournal of Materials Research, 1994
- Tunneling Cracks in Constrained LayersJournal of Applied Mechanics, 1993
- Cracking and damage mechanisms in ceramic/metal multilayersActa Metallurgica et Materialia, 1993
- The mechanics of crack growth in layered materialsActa Metallurgica et Materialia, 1993
- On crack extension in ductile/brittle laminatesActa Metallurgica et Materialia, 1991
- Kinking of a Crack out of an Interface: Role of In‐Plane StressJournal of the American Ceramic Society, 1991
- Microelectronics Packaging HandbookJournal of Electronic Packaging, 1989
- The use of surface profilometers for the measurement of wafer curvatureJournal of Vacuum Science & Technology A, 1988