A review of the application of analytical electron microscopy to ion-implanted materials
- 1 June 1986
- journal article
- review article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 16 (2-3) , 111-125
- https://doi.org/10.1016/0168-583x(86)90002-9
Abstract
No abstract availableKeywords
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