Microstructural control of diamond thin films by microlithographic patterning
- 15 October 1990
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 68 (8) , 4014-4019
- https://doi.org/10.1063/1.346237
Abstract
Microlithographic patterning has been used to elucidate the mechanisms controlling diamond film nucleation and grain growth. The approach is capable of establishing a degree of control over diamond nucleation on the substrate, which can be used to improve film uniformity and enhance fine grained microstructure. The observed microstructures in the patterned films are consistent with an intrinsic growth mechanism based upon defect-initiated renucleation.This publication has 8 references indexed in Scilit:
- Correlation Of Optical Properties And Surface Roughness Of Polycrystalline Diamond FilmsPublished by SPIE-Intl Soc Optical Eng ,1990
- Nucleation control and selective growth of diamond particles formed with plasma CVDJournal of Crystal Growth, 1990
- Effects of substrate pretreatment on the growth of diamond films with CVD methodJournal of Crystal Growth, 1990
- Focused ion-beam crater arrays for induced nucleation of diamond filmJournal of Vacuum Science & Technology B, 1989
- Selective nucleation and growth of diamond particles by plasma-assisted chemical vapor depositionApplied Physics Letters, 1989
- Growth of textured diamond films on foreign substrates from attached seed crystalsApplied Physics Letters, 1989
- Crystallization of diamond crystals and films by microwave assisted CVD (Part II)Materials Research Bulletin, 1988
- Diamond synthesis from gas phase in microwave plasmaJournal of Crystal Growth, 1983