In situ infrared ellipsometry study of the growth of hydrogenated amorphous carbon thin films
- 1 February 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 313-314, 704-707
- https://doi.org/10.1016/s0040-6090(97)00981-4
Abstract
No abstract availableKeywords
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