Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications

This publication has 21 references indexed in Scilit:

• Infrared phase-modulated ellipsometer for in-situ characterization of surfaces and thin films
  Published by SPIE-Intl Soc Optical Eng ,1992
• Infrared ellipsometer for the study of surfaces, thin films, and superlattices
  Applied Optics, 1992
• Infrared ellipsometry study of the oxidation mechanisms of hydrogenated amorphous silicon
  Surface Science, 1992
• Characteristic quantities of a cascade arc used as a light source for spectroscopic techniques
  Measurement Science and Technology, 1990
• Infrared spectroscopic ellipsometry using a Fourier transform infrared spectrometer: Some applications in thin-film characterization
  Review of Scientific Instruments, 1989
• I n s i t u infrared reflection absorption spectroscopic characterization of plasma enhanced chemical vapor deposited SiO2 films
  Journal of Applied Physics, 1988
• IR ellipsometry study of oriented molecular monolayers
  Thin Solid Films, 1988
• Spectroscopic ellipsometry in the infrared
  Infrared Physics, 1981
• The chemisorption of carbon monoxide on palladium single crystal surfaces: IR spectroscopic evidence for localised site adsorption
  Surface Science, 1978
• Automatic Ellipsometer with High Sensitivity and Special Advantages for Infrared Spectroscopy of Adsorbed Species
  Applied Optics, 1975