Ion implantation into non-planar targets: Monto Carlo simulations and analytical models
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 19-20, 45-49
- https://doi.org/10.1016/s0168-583x(87)80012-5
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Models for implantation into multilayer targetsApplied Physics A, 1986
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Distribution of implanted ions under arbitrarily shaped mask edgesPhysica Status Solidi (a), 1977
- Theoretical Considerations on Lateral Spread of Implanted IonsJapanese Journal of Applied Physics, 1972