Ion-beam induced epitaxy of silicon
- 1 April 1979
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 71 (2-3) , 267-269
- https://doi.org/10.1016/0375-9601(79)90183-x
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Plural and multiple scattering of low‐energy heavy particles in solidsPhysica Status Solidi (b), 1971