Comparison of Microstructure of Cross-Sectional CoCr Thin Film Specimens Prepared by Fracture, Microtome, and Ion-Beam Thinning Methods

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Abstract
Cross-sectional CoCr thin film specimens prepared by three different methods; fracture, ultra-microtome and ion-beam thinning, are observed by electron microscopes to investigate the differences in the microstructure revealed in the respective micrographs. It is shown that the specimen prepared by the ion-beam thinning method provides most detailed and clear crystallographic features of the film structure.