Thermal flow sensor for liquids and gases
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.Keywords
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